JPH0468539U - - Google Patents

Info

Publication number
JPH0468539U
JPH0468539U JP11110490U JP11110490U JPH0468539U JP H0468539 U JPH0468539 U JP H0468539U JP 11110490 U JP11110490 U JP 11110490U JP 11110490 U JP11110490 U JP 11110490U JP H0468539 U JPH0468539 U JP H0468539U
Authority
JP
Japan
Prior art keywords
flat portion
orientation flat
carrier
semiconductor substrate
alignment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11110490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11110490U priority Critical patent/JPH0468539U/ja
Publication of JPH0468539U publication Critical patent/JPH0468539U/ja
Pending legal-status Critical Current

Links

JP11110490U 1990-10-25 1990-10-25 Pending JPH0468539U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11110490U JPH0468539U (en]) 1990-10-25 1990-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11110490U JPH0468539U (en]) 1990-10-25 1990-10-25

Publications (1)

Publication Number Publication Date
JPH0468539U true JPH0468539U (en]) 1992-06-17

Family

ID=31858520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11110490U Pending JPH0468539U (en]) 1990-10-25 1990-10-25

Country Status (1)

Country Link
JP (1) JPH0468539U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254449A (ja) * 1985-09-02 1987-03-10 Matsushita Electric Ind Co Ltd ウエハ整列装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254449A (ja) * 1985-09-02 1987-03-10 Matsushita Electric Ind Co Ltd ウエハ整列装置

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